The piezoresistive pressure sensor chips from the CiS research institute are used where high precision, stability and reliability are required. The same sensor principle is now also used for force measurement in silicon strain gages. The strain-sensitive resistors are monolithically integrated into wafer-thin chips as Wheatstone's measuring bridge. To be found in hall 1, booth 150.
(CiS Forschungsinstitut für Mikrosensorik GmbH)
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